Journal of Electronic Materials · 1976 · 35 citations · 3 references
EngineeringMaterials ScienceNuclear EngineeringNuclear MaterialsNuclear PhysicsSemiconductor MaterialsDopingIon ImplantationNuclear TransmutationSemiconductor Device MaterialsSemiconductor PhysicsSilicon MaterialsSemiconductor DopingSiliconSilicon DopingSilicon ImpuritiesTransmutation
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