Design and characterization of a fully compliant out-of-plane thermal actuator

MEMS actuators and sensors: observations on their performance and selection for purpose

Dominik J. Bell, Tian Jian Lu, N.A. Fleck et al. · Journal of Micromechanics and Microengineering · 2005 · 385 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +17

Applications for surface-micromachined polysilicon thermal actuators and arrays

John H. Comtois, Victor M. Bright · Sensors and Actuators A Physical · 1997 · 206 citations

Engineering, Micromachines, Microfabrication +4

High-Performance Surface-Micromachined Inchworm Actuator

David L. Luck, W. Robert Ashurst, Roya Maboudian et al. · Journal of Microelectromechanical Systems · 2004 · 147 citations

Engineering, Mechanical Engineering, Biomedical Engineering +16

A high force low area MEMS thermal actuator

Mike Sinclair · 2002 · 137 citations

Engineering, Mechanical Engineering, Microactuator +19

Self-buckling of micromachined beams under resistive heating

Mu Chiao, Liwei Lin · Journal of Microelectromechanical Systems · 2000 · 113 citations

Engineering, Mechanical Buckling, Micromechanics +17