Silicon hotplates for metal oxide gas sensor elements

Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing

John S. Suehle, Richard E. Cavicchi, Michael Gaitan et al. · IEEE Electron Device Letters · 1993 · 332 citations · Full text

Engineering, Gas Sensor, Monolithic Tin Oxide +22

A thin-film SnO2 sensor system for simultaneous detection of CO and NO2 with neural signal evaluation

H.-E. Endres, Wolfgang Göttler, R. Hartinger et al. · Sensors and Actuators B Chemical · 1996 · 58 citations

Chemical Engineering, Simultaneous Detection, Engineering +10

Optimized Temperature Pulse Sequences For The Enhancement Of Chemically-specific Response Patterns From Micro-hotplate Gas Sensors

Richard E. Cavicchi, John S. Suehle, K.G. Kreider et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 21 citations

Sensing Film Surface, Engineering, Response Signatures +18

Improvement in signal evaluation methods for semiconductor gas sensors

H.-E. Endres, Wolfgang Göttler, Hildegard D. Jander et al. · Sensors and Actuators B Chemical · 1995 · 14 citations

Electrical Engineering, Engineering, Semiconductor Gas Sensors +8

Selected-area Deposition Of Multiple Active Films For Conductometric Microsensor Arrays

S. Semancik, Richard E. Cavicchi, K.G. Kreider et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 12 citations