Concepedia

Design and evaluation of a nitrogen purge system for the front opening unified pod (FOUP)

Shih-Cheng Hu, Tzong‐Ming Wu, Hong-Chong Lin, Kwen Hsu

Applied Thermal Engineering · 2006 · 24 citations · 1 references

DOI

Concepts

References

1

Reducing airborne molecular contamination by efficient purging of FOUPs for 300-mm wafers-the influence of materials properties

J. Frickinger, J. Bugler, G. Zielonka et al. · IEEE Transactions on Semiconductor Manufacturing · 2000 · 34 citations

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