Concepedia

New techniques of implantation for near-term applications

M. Bruel, M. Floccari, J. Labartino, Jean-François Michaud, A. Soubie

Nuclear Instruments and Methods in Physics Research · 1981 · 10 citations · 1 references

DOI

Concepts

References

1

Molecular effect in the expansion of ion implanted InSb

G. Destéfanis, J. P. Belle, J.M. Ogier-Collin et al. · Nuclear Instruments and Methods · 1981 · 10 citations

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