Applied Physics B · 2006 · 21 citations · 12 references
Natural SciencesPhysicsInstrumentationOpticsPlasma PhysicsCleanroom ProcessingLaser Material ProcessingLaser OpticsLaser PhysicsLaser Surface ProcessingLaser-plasma InteractionsAblation CleaningCleaning KineticsDry CleaningLaser Particle SizingLaser Surface CleaningParticle Capture MechanismsTime-of-flight Measurement
12
Optical field enhancement effects in laser-assisted particle removal
M. Mosbacher, H. Münzer, Jörg Zimmermann et al. · Applied Physics A · 2001 · 158 citations · Full text
Natural Sciences, Physics, Optics +13
Three-dimensional effects in dry laser cleaning
Boris Luk’yanchuk, N. Arnold, S-M Huang et al. · Applied Physics A · 2003 · 95 citations
Particle on surface: 3D-effects in dry laser cleaning
Boris Luk’yanchuk, Zhongbao Wang, Wen‐Dong Song et al. · Applied Physics A · 2004 · 77 citations