Interface reaction of poly-Si/high-k insulator systems studied by hard X-ray photoemission spectroscopy

High resolution-high energy x-ray photoelectron spectroscopy using third-generation synchrotron radiation source, and its application to Si-high k insulator systems

Keisuke Kobayashi, Makina Yabashi, Y. Takata et al. · Applied Physics Letters · 2003 · 353 citations

X-ray Spectroscopy, Engineering, Optoelectronic Devices +16

A probe of intrinsic valence band electronic structure: Hard x-ray photoemission

Y. Takata, Kenji Tamasaku, Takashi Tokushima et al. · Applied Physics Letters · 2004 · 100 citations

X-ray Spectroscopy, Engineering, Hard X-ray Photoemission +20

Intrinsic Valence Band Study of Molecular-Beam-Epitaxy-Grown GaAs and GaN by High-Resolution Hard X-ray Photoemission Spectroscopy

Keisuke Kobayashi, Y. Takata, Tetsuya Yamamoto et al. · Japanese Journal of Applied Physics · 2004 · 33 citations

Semiconductors, Wide-bandgap Semiconductor, Engineering +15

In-situ HfSiON/SiO<sub>2</sub> gate dielectric fabrication using hot wall batch system

Tadayoshi Aoyama, Satoshi Kamiyama, Y. Tamura et al. · 2003 · 13 citations