Applied Surface Science · 1995 · 21 citations · 1 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsInterface EngineeringSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsSemiconductor SurfacesSilicon MaterialsOhmic ConductionOhmic ContactsOhmic MaterialsSilicon CarbideSilicon Carbide (Sic) Materials
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Al and B ion-implantations in 6H- and 3C-SiC
Mulpuri V. Rao, Peter R. Griffiths, O. W. Holland et al. · Journal of Applied Physics · 1995 · 117 citations