Evaluation of the effect of surface roughness on thin film thickness measurements using variable angle XPS

Smoothing and Differentiation of Data by Simplified Least Squares Procedures.

Abraham Savitzky, Marcel J. E. Golay · Analytical Chemistry · 1964 · 21.3K citations

Natural Sciences, Chemistry, Analytical Chemistry +6

Practical surface analysis

E. Umbach · TrAC Trends in Analytical Chemistry · 1992 · 2.5K citations

Angle-resolved x-ray photoelectron spectroscopy

C. S. Fadley · Progress in Surface Science · 1984 · 640 citations

Natural Sciences, Materials Science, Physics +9

Surface analysis and angular distributions in x-ray photoelectron spectroscopy

C. S. Fadley, R. J. Baird, W. J. Siekhaus et al. · Journal of Electron Spectroscopy and Related Phenomena · 1974 · 434 citations · Full text

Natural Sciences, Materials Science, Spectroscopy +12

Properties of oxidized silicon as determined by angular-dependent X-ray photoelectron spectroscopy

Jeffrey Hill, D. G. Royce, C. S. Fadley et al. · Chemical Physics Letters · 1976 · 275 citations

Natural Sciences, Chemistry, Materials Science +14