Publication | Closed Access
A piezoelectric micropump with an integrated sensor based on space-division multiplexing
53
Citations
18
References
2013
Year
EngineeringMicromachinesSensorsMicrofabricationSpace-division MultiplexingPiezoelectric MicropumpPiezoelectricityPiezoelectric MaterialInstrumentationMicro-electromechanical SystemMicromachined Ultrasonic Transducer
| Year | Citations | |
|---|---|---|
Page 1
Page 1