Sensors and Actuators A Physical · 2013 · 53 citations · 18 references
EngineeringAerospace EngineeringElectrical EngineeringMicroelectromechanical SystemsMicrofabricationSensorsMems DesignMems SensorsMicroelectromechanical SensorsMicrofabrication ProcessesMicrofluidic DevicesPiezoelectric MaterialsMicropumpsMicroscale Piezoelectric DevicesPiezoelectric SensingPiezoelectric SensorsSpace-division Multiplexing
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