Journal of The Electrochemical Society · 1993 · 38 citations · 0 references
Chemical EngineeringEngineeringRtp OxynitridesReactive Nitrogen SpecieReoxidation ThicknessOxidation ResistanceGreen ChemistryReoxidation KineticsRedox ChemistryDeoxygenationChemistryReactive Oxygen SpecieMedicineRedox BiologyNitrosative StressOxidative Stress
We prepared oxynitrides with different interfacial nitrogen concentration using RTP. Reoxidation kinetics of these oxynitrides was studied. It was found that reoxidation thickness strongly depends on the . The reoxidation kinetics can be used for the evaluation of.