Publication | Closed Access
A new UHV system with integrated STM for industrial applications
12
Citations
2
References
1989
Year
EngineeringIndustrial EngineeringMicroscopyMechanical EngineeringIndustrial ElectronicsTunneling MicroscopyInstrumentationMaterials ScienceElectrical EngineeringNew Uhv SystemComputer EngineeringSurface CharacterizationMicrofabricationScanning Probe MicroscopySurface ScienceApplied PhysicsScanning Force MicroscopySurface AnalysisTip Handling SystemStandard Components
Standard components of surface analysis are integrated with a high-performance scanning tunnelling microscope (STM) into a UHV system. This new type of sample and tip handling system is fully compatible with the standard components and allows rapid exchange of samples and tips while maintaining UHV. The total drift of the STM was below 0.5 nm min-1; atomic resolution was attained on highly oriented pyrolytic graphite. The installation has a resonant frequency of 2 Hz and is thus efficiently insulated from ground vibrations. This makes it suitable for use in an industrial environment.
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