Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 17 citations · 0 references
EngineeringElectrical EngineeringMechanical EngineeringElectric MachinesMicroelectromechanical SystemsMicrofabricationElectromagnetic Torque ProductionMems DesignMems FabricationMicrofabrication ProcessesMicromachiningPermanent Magnet MachinesHard Disk DrivesMagnetic MicromotorsMicro-assemblyMicroformingPermanent Magnet ActuatorsPermanent Magnet Motor DesignTorqueTorque Output
For many applications in rapid growing markets of microproducts, e.g. miniaturized hard disk drives in personal computers, mobile optical scanners, or for the market of consumer electronics, a novel, penny-shaped micromotor was developed at IMM. Designed to provide an output torque of more than 100 (mu) Nm, the permanent magnet motor shows a diameter of 12.8 mm and a height of 1.4mm. Besides the maximum torque and the ultra-flat shape, one further essential design parameter was a construction that allows an easy assembly and is suitable for mass-production. An important contribution to mass production philosophy is the intensive use of microfabrication technologies especially for both, the production of the permanent magnet rings by micro molding and micro compressing techniques and the micro coils by the way of photolithographic batch processes.