Microcrystalline silicon deposited by the hot-wire CVD technique - Concepedia

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Microcrystalline silicon deposited by the hot-wire CVD technique

12

Citations

10

References

2000

Year

J. Guillet, Chisato Niikura, J.E. Bourée, Jean‐Paul Kleider, Christophe Longeaud, R. Brüggemann

Materials Science and Engineering B

EngineeringMicrofabricationApplied PhysicsSemiconductor Device FabricationMicrocrystalline SiliconElectronic PackagingSilicon On Insulator

References

	Year	Citations

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