X-ray diffraction as a tool to study the mechanical behaviour of thin films

Mechanical properties of thin films

William D. Nix · Metallurgical Transactions A · 1989 · 2.5K citations

Natural Sciences, Materials Engineering, Materials Science +15

Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history

P. A. Flinn, Donald S. Gardner, William D. Nix · IEEE Transactions on Electron Devices · 1987 · 586 citations

Natural Sciences, Materials Engineering, Materials Science +17

Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

Timothy P. Weihs, Soon-Il Hong, J. C. Bravman et al. · Journal of materials research/Pratt's guide to venture capital sources · 1988 · 380 citations

Natural Sciences, Materials Science, Mechanical Engineering +14

Separation of film thickness and grain boundary strengthening effects in Al thin films on Si

Ramnath Venkatraman, J. C. Bravman · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 348 citations

Natural Sciences, Materials Engineering, Materials Science +14

The Stability of a Dislocation Threading a Strained Layer on a Substrate

L. B. Freund · Journal of Applied Mechanics · 1987 · 271 citations

Natural Sciences, Materials Engineering, Materials Science +17