Thin Solid Films · 2006 · 10 citations · 12 references
Natural SciencesElectrical EngineeringPhysicsElectronic MaterialsPlasma PhysicsSemiconductor DevicesPlasma SourcesPlasma Surface TreatmentPlasma-surface InteractionsOxide BreakdownPlasma Display PanelsPlasma-induced DamagePlasma-induced Surface DamageProtective Oxide FilmsProtective Oxide Layers
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