Sensors and Actuators B Chemical · 1998 · 24 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsOxide SemiconductorsSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film Electrical PropertiesThin Film LithographyThin-film DepositionN-type Oxide SemiconductorsNitride Thin FilmsSemiconductor Oxide Thin FilmsThin Oxide FilmsThin Oxide LayersThin-film OxidesThin-film Sensors
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Chang Dong Feng, Yasuhiro Shimizu, Makoto Egashira · Journal of The Electrochemical Society · 1994 · 95 citations
Natural Sciences, Materials Engineering, Materials Science +17