Lattice relaxation and dislocation generation/annihilation in SiGe-on-insulator layers during Ge condensation process

Tsutomu Tezuka, Yoshihiko Moriyama, Shu Nakaharai, Naoharu Sugiyama, Norio Hirashita, Eiji Toyoda, Yoshiji Miyamura, Shin Takagi

Thin Solid Films · 2005 · 34 citations · 12 references

Concepts

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