Publication | Closed Access

Fabrication of Ge nanoclusters on Si with a buffer layer-assisted growth method

Materials ScienceEngineeringNanoclusterNanomaterialsNanotechnologyMicrofabricationApplied PhysicsGe NanoclustersSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsChemical Vapor DepositionNanolithography Method