Microstructure of thermal hillocks on blanket Al thin films

Mechanical properties of thin films

William D. Nix · Metallurgical Transactions A · 1989 · 2.5K citations

Natural Sciences, Materials Engineering, Materials Science +15

The preparation of cross‐section specimens for transmission electron microscopy

J. C. Bravman, Robert Sinclair · Journal of Electron Microscopy Technique · 1984 · 524 citations

Natural Sciences, Materials Science, Physics +11

Hillock growth in thin films

P. Chaudhari · Journal of Applied Physics · 1974 · 203 citations

Natural Sciences, Materials Engineering, Materials Science +17

The effect of surface aluminum oxide films on thermally induced hillock formation

Chih‐Yung Chang, R.W. Vook · Thin Solid Films · 1993 · 73 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

A study of hillock formation on AlTa alloy films for interconnections of TFT-LCDs

Eiji Iwamura, Takashi Ohnishi, Kazuo Yoshikawa · Thin Solid Films · 1995 · 59 citations

Natural Sciences, Materials Engineering, Materials Science +11