Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 22 citations · 0 references
Natural SciencesPhysicsElectromagnetismParticle PhysicsPlasma PhysicsBeam TheoryElectron Beam PhysicsPlasma SimulationBeam BroadeningBeam SimulationElectron Beam Energy SpectrumThermionic Emission
Different theories on the Boersch effect are applied to a simple beam geometry with one crossover in drift space.The results are compared with each other, with Monte Carlo simulations, and with the experiment. The most complete and accurate theory is given by van Leeuwen and Jansen. This theory predicts energy spreads within 10% of the Monte Carlo results for operating conditions usually given in systems with thermionic emission sources. No comprehensive theory, however, of energy broadening in electron guns has yet been presented. Nevertheless, the theory of van Leeuwen and Jansen was found to predict the experimental values by trend and within a factor of 2.