Publication | Closed Access

Direct evidence of the recombination of silicon interstitial atoms at the silicon surface

Materials ScienceIon ImplantationEngineeringPhysicsSurface ScienceApplied PhysicsSilicon SurfaceSiliceneAtomic PhysicsDirect EvidenceSemiconductor Device FabricationSilicon On InsulatorSilicon Interstitial AtomsSilicon Debugging