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Development of scanning microwave microscope with a lumped-constant resonator probe for high-throughput characterization of combinatorial dielectric materials

Materials ScienceLumped-constant Resonator ProbeMicrowave MicroscopeEngineeringMicrofabricationOptical PropertiesMicroscopyMicroscopy MethodApplied PhysicsScanning Probe MicroscopyMicrowave EngineeringCombinatorial Dielectric Materials