Concepedia

The analyses of an SiF4 plasma in an R.F. glow discharge for preparing fluorinated amorphous silicon thin films

Nobuki Mutsukura, Mikio Ohuchi, S. Satoh, Y. Machi

Thin Solid Films · 1983 · 29 citations · 15 references

DOI

Concepts

References

15

The identification of molecular spectra

Journal of the Franklin Institute · 1951 · 2.3K citations

, , +9

Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering

M. H. Brodsky, M. Cardona, J. J. Cuomo · Physical review. B, Solid state · 1977 · 1.6K citations

, , +17

A Floating Double Probe Method for Measurements in Gas Discharges

E. O. Johnson, L. Malter · Physical Review · 1950 · 626 citations

, , +7

The identification of molecular spectra

Gerald J. Small · International Journal of Mass Spectrometry and Ion Physics · 1977 · 384 citations

, , +9

Plasma spectroscopy—Glow discharge deposition of hydrogenated amorphous silicon

Akihisa Matsuda, Kazunobu Tanaka · Thin Solid Films · 1982 · 198 citations

, , +12