Prototypes of Micro Nontweezing Handling Tools with Releasing Mechanism.

Abstract

In order to manufacture micromachines, development of micromanipulation is indispensable. This paper treats micro handling tools as end-effectors of a micromanipulation system, and introduces three prototypes of nontweezing tools : air-sucking, electrostatically charged, and surface-tensional ones. These three can handle microparts (l0 to 500 μm in length). In particular, they can perfectly release the microparts with several methods, such as ultrasonic vibration. Through theiractual usage, we confirm the validity of the tools for micromanipulation.