Comparison study of ITO thin films deposited onto different substrates at room temperature

Offset masks for lift-off photoprocessing

G. J. Dolan · Applied Physics Letters · 1977 · 692 citations

Engineering, Electrical Engineering, Materials Science +14

Electrical and optical properties of amorphous indium oxide

J. R. Bellingham, W. A. Phillips, C. J. Adkins · Journal of Physics Condensed Matter · 1990 · 272 citations

Natural Sciences, Materials Science, Physics +17

Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by d.c. reactive sputtering

T. Karasawa, Yutaka Miyata · Thin Solid Films · 1993 · 164 citations

Natural Sciences, Materials Engineering, Materials Science +17

Physics of very thin ITO conducting films with high transparency prepared by DC magnetron sputtering

Tadatsugu Minami, Hideo Sonohara, Toshikazu Kakumu et al. · Thin Solid Films · 1995 · 140 citations

Natural Sciences, Materials Science, Physics +16

Effect of O2 pressure during deposition on properties of rf-sputtered Sn-doped In2O3 films

John C. C. Fan, Frank J. Bachner, G. Foley · Applied Physics Letters · 1977 · 128 citations

Natural Sciences, Materials Engineering, Materials Science +17