Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by d.c. reactive sputtering - Concepedia

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Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by d.c. reactive sputtering

164

Citations

9

References

1993

Year

T. Karasawa, Yutaka Miyata

Thin Solid Films

Materials ScienceElectrical EngineeringOptical MaterialsEngineeringOptical PropertiesOxide ElectronicsSurface ScienceApplied PhysicsD.c. Reactive SputteringThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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