Technology for Fast Fabrication of Glass Microhotplates Based on the Laser Processing

Abstract

In this paper, we describe a novel cost-effective and simple technology for the production glass MEMS applied as microhotpalte platform for metal oxide gas sensors. The basis of the technology is magnetron sputtering of platinum heating layer followed by precise laser engraving and cutting used for heater patterning. As a result of the technology, we demonstrate the glass microhotplate cantilever with thickness of 30 μm equipped with platinum microheater with dimension of about 500×500 μm. The cantilever type MEMS microhotplate demonstrate very high stability at working temperatures up to 600 0C, which gives possibility to use it for the low-scale fabrication microhotplate of metal oxide gas sensors.