A Novel Strategy for the Synthesis of CeO2/CeF3 Composite Powders with Improved Suspension Stability and Chemical Mechanical Polishing (CMP) Performance

Synthesis of CeO2-coated SiO2 nanoparticle and dispersion stability of its suspension

Xiaolan Song, Nan Jiang, Yukun Li et al. · Materials Chemistry and Physics · 2008 · 144 citations

Natural Sciences, Materials Engineering, Materials Science +14

Chemical mechanical polishing of thermal oxide films using silica particles coated with ceria

Seungho Lee, Zhenyu Lu, S. V. Babu et al. · Journal of materials research/Pratt's guide to venture capital sources · 2002 · 119 citations

Natural Sciences, Materials Engineering, Materials Science +12

Polishing behaviors of ceria abrasives on silicon dioxide and silicon nitride CMP

Myoung-Hwan Oh, Jun‐Seok Nho, Seung‐Beom Cho et al. · Powder Technology · 2010 · 87 citations

Engineering, Materials Engineering, Materials Science +14

Thermal properties and tribological characteristics of CeF3 compact

Jinjun Lü, Qunji Xue, Jinlin Ouyang · Wear · 1997 · 19 citations

Engineering, Materials Engineering, Materials Science +13

Reduction of Large Particles in Ceria Slurry by Aging and Selective Sedimentation and its Effect on Shallow Trench Isolation Chemical Mechanical Planarization

Dae‐Hyeong Kim, Hyun-Goo Kang, Sangkyun Kim et al. · Japanese Journal of Applied Physics · 2006 · 12 citations

Engineering, Materials Engineering, Materials Science +13