Publication | Closed Access
Polishing behaviors of ceria abrasives on silicon dioxide and silicon nitride CMP
79
Citations
17
References
2010
Year
Materials EngineeringMaterials ScienceEngineeringMaterial ProcessingCorrosionSurface ScienceApplied PhysicsCeria AbrasivesCermetAbrasive ProcessSurface ProcessingAbrasive MachiningMicrostructureSilicon Dioxide
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