Concepedia

Chemical mechanical polishing of thermal oxide films using silica particles coated with ceria

Seungho Lee, Zhenyu Lu, S. V. Babu, Egon Matijević

Journal of materials research/Pratt's guide to venture capital sources · 2002 · 119 citations · 9 references

DOI

Concepts

References

9

Characterization of Cerium(IV) Oxide Ultrafine Particles Prepared Using Reversed Micelles

Toshiyuki Masui, Kazuyasu Fujiwara, Ken‐ichi Machida et al. · Chemistry of Materials · 1997 · 472 citations

, , +16

Reactive Cerium(IV) Oxide Powders by the Homogeneous Precipitation Method

Pei‐Lin Chen, I‐Wei Chen · Journal of the American Ceramic Society · 1993 · 369 citations · Full text

, , +14

Mechanism of polishing of SiO2 films by CeO2 particles

Tetsuya Hoshino, Y. Kurata, Yuuki Terasaki et al. · Journal of Non-Crystalline Solids · 2001 · 300 citations

, , +5

Preparation and properties of monodispersed colloidal particles of lanthanide compounds. 2. Cerium(IV)

Wan Peter Hsu, Lena Ronnquist, Egon Matijević · Langmuir · 1988 · 234 citations

, , +13

Hydrothermal Synthesis of Cerium(IV) Oxide

Masanori Hirano, Etsuro KATO · Journal of the American Ceramic Society · 1996 · 215 citations

, , +10