Precision Grinding of Aspherical CVD-SiC Molding Die

Abstract

This paper deals with the precision grinding of the axisymmetric aspherical surface. In this study, a 2-axes controlled aspherical grinding system with an on-machine measurement probe and the wheel scanning speed controle system were developed. In the grinding experiments, CVD-SiC (silicon carbide) of the glass molding die was tested. To evaluate the errors of the tool positioning and the tool shape, the distribution of the form deviation of the primary ground workpiece was measured, and then to compensate those errors NC-program was edited. With this system, a form accuracy of about 0.1 μm P-V and a surface roughness of about 0.01 μm Rmax were obtained.