Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 14 citations · 0 references
Natural SciencesElectrical EngineeringMaterials ScienceNanotechnologySemiconductor MaterialsSurface ScienceElectron MicroscopyQuantum TunnelingScanning Probe MicroscopySurface MicroscopyTunnelingCurrent Density DistributionMicroscopyMicroscopy ImagingScanning Electron MicroscopyScanning Electron Microscopy AnalysisTunneling In Nanostructures
Two scanning tunneling microscopes (STMs) compatible with scanning electron microscope or optical microscope are presented. One STM is based on bimorph piezos and has a scanning range of about 10 μm. The other STM is based on a solid piezoblock with frequencies higher than 8 kHz and with a scanning range of about 3 μm. Some results demonstrate the capabilities of these microscopes. Among them are the observations of the microbridge, of the grain boundary in twinned crystal, the imaging of topography, and tunneling current distribution on the cleaved multilayer GaAs–AlGaAs structure.