Reduced pressure-chemical vapor deposition of intrinsic and doped Ge layers on Si(001) for microelectronics and optoelectronics purposes

Jean‐Michel Hartmann, J.F. Damlencourt, Y. Bogumilowicz, P. Holliger, G. Rolland, T. Billon

Journal of Crystal Growth · 2004 · 136 citations · 26 references

Concepts

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