2003 · 11 citations · 7 references
EngineeringChemical EngineeringChemistryElectrochemical EngineeringElectrochemistryMicrofabricationBattery TechnologyElectrochemical CellsElectrochemical Energy StorageElectrode MaterialsElectrolyte SolutionsEnergy StorageBattery Energy StorageElectrochemical CharacterizationElectrochemical MicromachiningElectrolyte ChemistryElectrolyte CompositionElectrolytesMetal Oxide ElectrodesVoltage
A micromachined battery based on liquid electrolyte and metal electrodes for on-demand and disposable usage has been successfully demonstrated. The microbattery with gold as the positive electrode and zinc as the negative electrode is fabricated by using surface micromachining technology and tested with an electrolyte consisting of sulfuric acid and hydrogen peroxide. The operation of the battery can be on-demand by putting a droplet of electrolyte to activate operation. Theoretical voltage and capacity of the microbattery are formulated and compared with experimental results. The experimental study shows that a maximum voltage of 1.5 V and maximum capacity of 122.2 /spl mu/W-min have been achieved.
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Macro Power from Micro Machinery
Alan H. Epstein, S.D. Senturia · Science · 1997 · 274 citations
Alan H. Epstein, S.D. Senturia, G. Anathasuresh et al. · 2002 · 153 citations