Fabrication of microneedle array using inclined LIGA process

Abstract

We demonstrate a novel fabrication techonology for painless microneedle array with PMMA (PolyMethylMeta Acrylic). In order to make painless transdermal microneedle array for drug injection and blood extraction, inclined LIGA process is applied to demonstrate the fabrication feasibility. This process provides more sharp, robust and high out-of-plane microneedle array structure than conventional silicon based microneedle array. The microneedle proto-types, which have different shape of tip, base and hole type, have been successfully fabricated and tested by penetrating human hand skin to extract whole blood. With the new fabrication technology, microneedles had sufficient mechanical strength, height and sharpness to penetrate hand skin without pain and needle tip break. The PMMA microneedle array can be used as a mass production mold base for nickel electroplating process; on the other hand, silicon based microneedle array is used in itself.