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A 256K flash EEPROM using triple polysilicon technology

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1985

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Abstract

This report will cover a 256K Flash Electrically Erasable PROM with a single transistor cell. Chip size of 5.7×5.8mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> was achieved by using 2.0μ design rules and triple polysilicon technology.