Growth of RuO2 thin films by pulsed-laser deposition

High dielectric constant (Ba,Sr)TiO3 thin films prepared on RuO2/sapphire

Koichi Takemura, Toshiyuki Sakuma, Yoichi Miyasaka · Applied Physics Letters · 1994 · 142 citations

Materials Engineering, Materials Science, Bottom Electrode +12

(Ba, Sr)TiO₃ Films Prepared by Liquid Source Chemical Vapor Deposition on Ru Electrodes

Takaaki Kawahara, Mikio Yamamuka, Akimasa Yuuki et al. · Japanese Journal of Applied Physics · 1996 · 95 citations

Materials Science, Materials Engineering, Electrical Engineering +13

RuO₂/TiN-Based Storage Electrodes for (Ba, Sr)TiO₃ Dynamic Random Access Memory Capacitors

Koichi Takemura, Shintaro Yamamichi, Pierre‐Yves Lesaicherre et al. · Japanese Journal of Applied Physics · 1995 · 74 citations

Non-volatile Memory, Engineering, Electrode-electrolyte Interface +17

Annealing of RuO₂ and Ru Bottom Electrodes and Its Effects on the Electrical Properties of (Ba,Sr)TiO₃ Thin Films

Joon-Hyung Ahn, Won-Youl Choi, Won-Jae Lee et al. · Japanese Journal of Applied Physics · 1998 · 42 citations

Materials Science, Oxide Heterostructures, Electrical Engineering +14

Advantages of RuO_x Bottom Electrode in the Dielectric and Leakage Characteristics of (Ba,Sr)TiO₃ Capacitor

Y. T. Lee · Japanese Journal of Applied Physics · 1996 · 29 citations

Materials Science, Crystal Structure, Electrical Engineering +9