Shintaro Yamamichi

Barrier layers for realization of high capacitance density in SrTiO3 thin-film capacitor on silicon

Toshiyuki Sakuma, Shintaro Yamamichi, S. Matsubara et al. · Applied Physics Letters · 1990 · 154 citations

High-temperature Annealing, Engineering, Thin Film Process Technology +16

SrTiO₃ Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties

Shintaro Yamamichi, Toshiyuki Sakuma, Koichi Takemura et al. · Japanese Journal of Applied Physics · 1991 · 142 citations

Materials Science, Oxide Heterostructures, Dielectric Properties +11

(Ba+Sr)/Ti ratio dependence of the dielectric properties for (Ba0.5Sr0.5)TiO3 thin films prepared by ion beam sputtering

Shintaro Yamamichi, Hisato Yabuta, Toshiyuki Sakuma et al. · Applied Physics Letters · 1994 · 126 citations

Materials Engineering, Materials Science, Dielectric Properties +13

RuO₂/TiN-Based Storage Electrodes for (Ba, Sr)TiO₃ Dynamic Random Access Memory Capacitors

Koichi Takemura, Shintaro Yamamichi, Pierre‐Yves Lesaicherre et al. · Japanese Journal of Applied Physics · 1995 · 74 citations

Non-volatile Memory, Engineering, Electrode-electrolyte Interface +17

A stacked capacitor technology with ECR plasma MOCVD (Ba,Sr)TiO/sub 3/ and RuO/sub 2//Ru/TiN/TiSi/sub x/ storage nodes for Gb-scale DRAMs

Shintaro Yamamichi, Pierre‐Yves Lesaicherre, Hisateru Yamaguchi et al. · IEEE Transactions on Electron Devices · 1997 · 46 citations

Non-volatile Memory, Engineering, Thin Film Process Technology +17