Tribology Letters · 1998 · 14 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceNanotechnologySurface ScienceThin FilmsMagnetic Thin FilmsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsMagnetron SputteringNanocrystalline Thin FilmsSputter DepositionSputteringSputtering Processes
11
Deposition of TiB2 films by a co-sputtering method
Tatsuo Shikama, Y. Sakai, Masao Fukutomi et al. · Thin Solid Films · 1988 · 54 citations
Natural Sciences, Materials Engineering, Materials Science +10