Journal of Electroanalytical Chemistry · 1989 · 50 citations · 15 references
EngineeringChemistryElectrical EngineeringElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEtching ProcessesOxidation-reduction ReactionsSemiconductor Device MaterialsSemiconductor HeterostructuresSemiconductor InterfacesSemiconductor PhysicsChemical EtchingEtch ChemistryEtch MechanismsEtchingReduction Reactions
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