Concepedia

Abstract

The densities of NH and NH2 radicals in an Ar–NH3 plasma jet created by the expanding thermal plasma source were investigated for various source-operating conditions such as plasma current and NH3 flow. The radicals were measured by cavity ringdown absorption spectroscopy using the (0,0) band of the AΠ3←XΣ−3 transition for NH and the (0,9,0)-(0,0,0) band of the ÃA12←X̃B12 transition for NH2. For NH, a kinetic gas temperature and rotational temperature of 1750±100 and 1920±100K were found, respectively. The measurements revealed typical densities of 2.5×1012cm−3 for the NH radical and 3.5×1012cm−3 for the NH2 radical. From the combination of the data with ion density and NH3 consumption measurements in the plasma as well as from a simple one-dimensional plug down model, the key production reactions for NH and NH2 are discussed.

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