Concepedia

Publication | Closed Access

Impact of pattern dependency of SiGe layers grown selectively in source/drain on the performance of 14nm node FinFETs

DOI

23

Citations

17

References

2016

Year

Changliang Qin, Guilei Wang, Mohammadreza Kolahdouz, Jun Luo, H. F. Yin, Ping Yang, Junfeng Li, Huilong Zhu, Chao Zhao, Tianchun Ye,
Solid-State Electronics

References

YearCitations

Page 1