The Shave-off Depth Profiling by the Nano-Beam SIMS

Abstract

The shave-off depth profiling achieves the highly precise depth profiling with nanometer-dimensional depth resolution. This method is a very unique depth profiling for acquiring a depth profile by the shave-off scanning mode (A fast horizontal sweep of an FIB is combined with a very slow vertical sweep). The FIB of dynamic condition shaves completely off the sample from the surface to the depth direction. This method can be advanced in its flexibility and applicability by an introduction of the lift-out method which conventionally used as a sample preparation tool for TEM. Combining the lift-out method with the shave-off depth profiling, the highly precise depth profiling of the selected 3D volume in the bulk sample has been realized with nanometer-dimensional depth resolution. And we also discussed the effect of a protection film in order to keep on sharp cutting edge.