Compugraphics (United Kingdom)

Cost-effective overlay and CD metrology on phase-shifting masks

Martin McCallum, Stewart Smith, Andrew C. Hourd et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 13 citations

Engineering, Measurement, Optic Design +16

Proceedings of the ninth international conference on 3D Web technology

Don Brutzman, Luca Chittaro, Richard Puk · 2004 · 13 citations

Engineering, Computer Animation, 3D Modeling +19

On-Mask CD and Overlay Test Structures for Alternating Aperture Phase Shift Lithography

Stewart Smith, Martin McCallum, A.J. Walton et al. · IEEE Transactions on Semiconductor Manufacturing · 2005 · 13 citations

On-mask Cd, Engineering, Electron-beam Lithography +16

Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks

Stewart Smith, Andreas Tsiamis, Martin McCallum et al. · IEEE Transactions on Semiconductor Manufacturing · 2009 · 12 citations

Engineering, Measurement, Microscopy +24

First fossil-leaf floras from Brunei Darussalam show dipterocarp dominance in Borneo by the Pliocene

Peter Wilf, Xiaoyu Zou, Michael P. Donovan et al. · PeerJ · 2022 · 11 citations · Full text