Concepedia
Statistics
Publications
21
Citations
386
Authors
3
Location
Santa Clara, United States
Multibeam (United States) is a company institution in Santa Clara, United States known for engineering, optical lithography, and electrical engineering.
Top concepts
EngineeringOptical LithographyElectrical EngineeringLine PatterningMicrofabricationDigital FabricationDigital LithographyComputer EngineeringPhotonicsOptoelectronics
Multibeam (United States), United States
12 publications · 98 citations
5
h-index
6 publications · 69 citations
4
1 publications · 17 citations
1
1–3 of 3
E-beam to complement optical lithography for 1D layouts
David Lam, Enden D. Liu, Michael C. Smayling et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 35 citations · Full text
Engineering, Computer Engineering, Electrical Engineering +14
Practical laser-activated photoemissive electron source
Chunghsin Lee, P. E. Oettinger, Alan Sliski et al. · Review of Scientific Instruments · 1985 · 19 citations
Engineering, Electrical Engineering, Electronic Materials +11
E-beam direct write (EBDW) as complementary lithography
David Lam, Dave Liu, Ted Prescop · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 17 citations · Full text
Engineering, Computer Engineering, Manufacturing Engineering +12
Optimization of e-beam landing energy for EBDW
Enden D. Liu, Ted Prescop · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 16 citations
Engineering, Electrical Engineering, Electronic Materials +16
1–4 of 21