Tilt Optimization

Tilt Optimization is a methodological framework in ion implantation that specifies the systematic adjustment of ion beam incidence angles to minimize channeling effects and achieve desired dopant depth profiles, differentiating it from general implantation techniques by its focus on angular parameter refinement for enhanced crystal lattice integrity and doping precision.

64

Publications

2.6K

Citations

211

Authors

107

Institutions

Publications per year

2017–2026

19

Authors

211

  1. BS
    Boris S. Mordukhovich

    Wayne State University, United States

    3 publications · 168 citations

    3

    h-index

  2. RT
    R. T. Rockafellar

    University of Washington, United States

    3 publications · 434 citations

    3

    h-index

  3. MA
    Mehmet Ali Kallioğlu

    Batman University, Türkiye

    2 publications · 42 citations

    2

    h-index

  4. RA
    R. A. Poliquin

    University of Alberta, Canada

    2 publications · 308 citations

    2

    h-index

  5. AR
    Ashish Raj

    Poornima University, India

    2 publications · 27 citations

    2

    h-index

1–5 of 211

Venues

  1. SIAM Journal on Optimization

    4 publications · 509 citations

    4

    h-index

  2. Energy Procedia

    3 publications · 269 citations

    3

    h-index

  3. Boundary-Layer Meteorology

    2 publications · 89 citations

    2

    h-index

  4. Journal of Structural Biology

    2 publications · 211 citations

    2

    h-index

  5. Applied Optics

    2 publications · 91 citations

    2

    h-index

1–5