Release Holes

Release Holes is a micromachining feature consisting of specifically etched openings in a sacrificial layer that enable the selective removal of underlying material to facilitate the mechanical release and suspension of microstructures in surface micromachined devices.

38

Publications

1.3K

Citations

144

Authors

79

Institutions

Publications per year

2017–2026

11

Authors

144

  1. FA
    Fumihito Arai

    Nagoya University, Japan

    2 publications · 71 citations

    2

    h-index

  2. TF
    Toshio Fukuda

    Nagoya University, Japan

    2 publications · 71 citations

    2

    h-index

  3. MH
    Mami Harada

    Toyama Prefectural Agricultural, Forestry & Fisheries Research Center, Japan

    1 publications · 34 citations

    1

    h-index

  4. TP
    Ting Pang

    Texas A&M University, United States

    1 publications · 93 citations

    1

    h-index

  5. SC
    Solange Corrêa Garcia Pires D'Ávila

    Faculdade de Medicina de São José do Rio Preto, Brazil

    1 publications · 14 citations

    1

    h-index

1–5 of 144

Venues

  1. Journal of Prosthetic Dentistry

    2 publications · 36 citations

    2

    h-index

  2. Phycologia

    1 publications · 17 citations

    1

    h-index

  3. Proceedings of the National Academy of Sciences

    PNAS · 1 publications · 93 citations

    1

    h-index

  4. Fisheries Science

    1 publications · 34 citations

    1

    h-index

  5. 1

    h-index

1–5