Concepedia

Pattern Uniformity

Pattern Uniformity is a metric in thin-film patterning that quantifies the consistency of feature dimensions and spatial arrangement across a substrate, distinguishing it from other patterning metrics by specifically evaluating the deviation from ideal uniformity in replicated micro- or nano-scale patterns.

178

Publications

7.8K

Citations

868

Authors

240

Institutions

Publications per year

2017–2026

50

Parents

Publications

178

Designing PbSe Nanowires and Nanorings through Oriented Attachment of Nanoparticles

Kyung‐Sang Cho, Dmitri V. Talapin, Wolfgang Gaschler et al. · Journal of the American Chemical Society · 2005 · 1.2K citations

, , +16

Wafer-Scale Highly Oriented Monolayer MoS<sub>2</sub> with Large Domain Sizes

Qinqin Wang, Na Li, Jian Tang et al. · Nano Letters · 2020 · 268 citations

, , +14

Patterned growth of single-walled carbon nanotubes on full 4-inch wafers

Nathan R. Franklin, Yiming Li, Robert J. Chen et al. · Applied Physics Letters · 2001 · 202 citations

, , +16

Synthesis of Discrete and Dispersible Hollow Carbon Nanospheres with High Uniformity by Using Confined Nanospace Pyrolysis

An‐Hui Lu, Tao Sun, Wen‐Cui Li et al. · Angewandte Chemie International Edition · 2011 · 200 citations

, , +11

Nanoimprinting over topography and multilayer three-dimensional printing

Lirong Bao, Xing Cheng, X. D. Huang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 153 citations

, , +16

1–5 of 178

Authors

868

  1. HL
    Haiou Lu

    University Town of Shenzhen, China

    3 publications · 137 citations

    3

    h-index

  2. CG
    C. Gourgon

    Centre National de la Recherche Scientifique, France

    3 publications · 67 citations

    3

    h-index

  3. XL
    Xinghui Li

    Tsinghua University, China

    3 publications · 137 citations

    3

    h-index

  4. LJ
    L. Jay Guo

    University of Michigan, United States

    3 publications · 267 citations

    3

    h-index

  5. QZ
    Qian Zhou

    Tsinghua University, China

    3 publications · 137 citations

    3

    h-index

1–5 of 868

Institutions

240

  1. University of Michigan

    Ann Arbor, United States

    6 h-index

    24 publications

    1.6K citations

  2. Seoul National University

    Seoul, South Korea

    5 h-index

    22 publications

    977 citations

  3. National Taiwan University

    Taipei, Taiwan

    5 h-index

    13 publications

    285 citations

  4. Korea Institute of Science and Technology

    Seoul, South Korea

    4 h-index

    7 publications

    287 citations

  5. Chinese Academy of Sciences

    Beijing, China

    4 h-index

    24 publications

    4.7K citations

  6. Dalian University

    Dalian, China

    3 h-index

    16 publications

    1.7K citations

  7. Institute of Materials Research and Engineering

    Singapore, Singapore

    3 h-index

    10 publications

    1.2K citations

  8. The University of Texas at Austin

    Austin, United States

    3 h-index

    8 publications

    162 citations

1–8 of 240

Venues

  1. Applied Physics Letters

    11 publications · 599 citations

    11

    h-index

  2. 10

    h-index

  3. Optics Express

    8 publications · 317 citations

    8

    h-index

  4. Journal of Micromechanics and Microengineering

    JMM · 6 publications · 208 citations

    6

    h-index

  5. Japanese Journal of Applied Physics

    JJAP · 6 publications · 86 citations

    6

    h-index

1–5