Haiou Lu

Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability

Gaopeng Xue, Qihang Zhai, Haiou Lu et al. · Microsystems & Nanoengineering · 2021 · 55 citations · Full text

Holographic fabrication of an arrayed one-axis scale grating for a two-probe optical linear encoder

Xinghui Li, Qian Zhou, Xiangwen Zhu et al. · Optics Express · 2017 · 42 citations · Full text

Photonics, Holography, Engineering +14

Patterning nanoscale crossed grating with high uniformity by using two-axis Lloyd’s mirrors based interference lithography

Gaopeng Xue, Haiou Lu, Xinghui Li et al. · Optics Express · 2020 · 40 citations · Full text

An Orthogonal Type Two-Axis Lloyd’s Mirror for Holographic Fabrication of Two-Dimensional Planar Scale Gratings with Large Area

Xinghui Li, Haiou Lu, Qian Zhou et al. · Applied Sciences · 2018 · 37 citations · Full text

Large Area, Holography, Engineering +17

Design and Testing of a Compact Optical Prism Module for Multi-Degree-of-Freedom Grating Interferometry Application

Xinghui Li, Yaping Shi, Xiang Xiao et al. · Applied Sciences · 2018 · 32 citations · Full text

Optical Design, Optical Materials, Engineering +19